silane gas

Silane Gas

“Flowing Pure Silicon”— One of The Most Important Sources of High-Purity Silicon

Product Description​

Based on its silane gas equipment, CSG develops high-end products such as electronic-grade silane gas, electronic-grade trichlorosilane, and electronic-grade dichlorosilane, continuously creating high-value-added products.

Product
GasFormulaPurity
SilaneSiH₄6N

Key Advantages

State-of-the-art high-precision analytical testing equipment and comprehensive total quality management of products and production processes

Experienced after-sales engineers and a dedicated fleet of hazardous goods transport vehicles

Tailor-made solutions for a variety of needs in different industrial sectors

Product Specifications

Main Silane Gas Specifications

Component

Specification

Silane

>99.9999%

Hydrogen

<20ppm

Oxygen+Argon

<0.05ppm

Nitrogen

<0.5ppm

Methane

<0.05ppm

Non-methane Hydrocarbons

<0.1ppm

Carbon Monoxide

<0.05ppm

Carbon Dioxide

<0.05ppm

Chlorosilanes

<0.1ppm

Disilane

<0.3ppm

Water

<0.5ppm

Total Impurity Content

<1ppm

Production Capacity

5,000 tons of electronic-grade silane gas per year (capable of meeting the annual demand for 300 GW PV cells)

Applications

  • Photovoltaic Cells
  • Semiconductor Manufacturing
  • Battery Silicon-Carbon Anode
  • Display Panel Manufacturing

Packaging

packaging

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